Insulating gases for electronic equipment, radar waveguides, particle accelerators, transformers, surge arresters, refrigerants, tracers, etching in medical, semiconductor manufacturing, chemical vapor deposition, standard gases, leak detection gases, chromatograph loading gas.
PRODUCT NAME
SF6
CAS：2551-62-4
MF：SF6
PHYSICAL PROPERTIES |
Melting point | -50.5℃ |
Sublimation temperature | -63.7℃ |
Liquid density | （-50.8℃）1880kg/m3 |
Critical temperature | 45.5℃ |
Critical pressure | 3759KPa |
Critical density | 736kg/m3 |
QUALITY STANDARD |
SF6 | ≥99.999% | ≥99.99% |
O2+Ar | ≤2.0ppmv | ≤10ppmv |
N2 | ≤3.0ppmv | ≤40ppmv |
CF4 | ≤0.5ppmv | ≤30ppmv |
H2O | ≤2.0ppmv | ≤10ppmv |
HF | ≤0.1ppmw | ≤0.3ppmw |
THC(CH4) | ≤0.1ppmv | ≤1.0ppmv |
CO2 | ≤0.5ppmv | ≤6ppmv |
C0 | ≤0.5ppmv | ≤2ppmv |
APPLICATION SCOPE
Insulating gases for electronic equipment, radar waveguides, particle accelerators, transformers, surge arresters, refrigerants, tracers, etching in medical, semiconductor manufacturing, chemical vapor deposition, standard gases, leak detection gases, chromatograph loading gas.
PACKAGE
The product adopts steel seamless gas cylinders in various specifications and serial packaging to meet different user needs.
Cylinder specifications | DOT/48.8 L | DOT/47L | 40L | 10L | 4L |
Valve model | CGA580 CGA590 QF-2 |
SF6 Quality Indicators
Item | Index |
SF6 | ≥99.999% | ≥99.99% |
O2+Ar | ≤2.0 ppmv | ≤10 ppmv |
N2 | ≤3.0 ppmv | ≤40 ppmv |
CF4 | ≤0.5 ppmv | ≤30 ppmv |
H2O | ≤2.0 ppmv | ≤10 ppmv |
HF | ≤0.1 ppmw | ≤0.3 ppmw |
THC(CH4) | ≤0.1 ppmv | ≤1.0 ppmv |
CO2 | ≤0.5 ppmv | ≤6 ppmv |
C0 | ≤0.5 ppmv | ≤2 ppmv |
