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Sulfur hexafluoride
    Publish time 2021-08-14 16:31    

Insulating gases for electronic equipment, radar waveguides, particle accelerators, transformers, surge arresters, refrigerants, tracers, etching in medical, semiconductor manufacturing, chemical vapor deposition, standard gases, leak detection gases, chromatograph loading gas.

Sulfur hexafluoride

PRODUCT NAME

SF6

CAS:2551-62-4

MF:SF6

PHYSICAL   PROPERTIES

Melting point

-50.5℃

Sublimation   temperature

-63.7℃

Liquid density

(-50.8℃)1880kg/m3

Critical   temperature

45.5℃

Critical   pressure

3759KPa

Critical density

736kg/m3

 

QUALITY   STANDARD

SF6

≥99.999%

≥99.99%

O2+Ar

≤2.0ppmv

 ≤10ppmv

N2

≤3.0ppmv

≤40ppmv

CF4

≤0.5ppmv

≤30ppmv

H2O

≤2.0ppmv

≤10ppmv

HF

≤0.1ppmw

≤0.3ppmw

THC(CH4)

≤0.1ppmv

≤1.0ppmv

CO2

≤0.5ppmv

≤6ppmv

C0

≤0.5ppmv

≤2ppmv

APPLICATION SCOPE

Insulating gases for electronic equipment, radar waveguides, particle accelerators, transformers, surge arresters, refrigerants, tracers, etching in medical, semiconductor manufacturing, chemical vapor deposition, standard gases, leak detection gases, chromatograph loading gas.

 

PACKAGE

The product adopts steel seamless gas cylinders in various specifications and serial packaging to meet different user needs.

 

Cylinder specifications

DOT/48.8 L

DOT/47L

40L

10L

4L

Valve model

CGA580         CGA590         QF-2

 

SF6 Quality Indicators

Item

Index

SF6

≥99.999%

≥99.99%

O2+Ar

≤2.0  ppmv

≤10 ppmv

N2

≤3.0  ppmv

≤40  ppmv

CF4

≤0.5  ppmv

≤30  ppmv

H2O

≤2.0  ppmv

≤10 ppmv

HF

≤0.1  ppmw

≤0.3 ppmw

THC(CH4)

≤0.1 ppmv

≤1.0  ppmv

CO2

≤0.5  ppmv

≤6  ppmv

C0

≤0.5  ppmv

≤2  ppmv